TY - GEN
T1 - An electrochemically actuated micro dosing system with improved dosing control
AU - Böhm, Sebastian
AU - Olthuis, Wouter
AU - Bergveld, Piet
N1 - Funding Information:
The authors whish to thank Mr. J. Borner for the manufacturing of the devices and Mr. J Emmelkamp and Mr. L. Tuinstra for designing the device and performing measurements. This work has been financially supported by the Dutch foundation for Fundamental Research on Matter (FOM).
Publisher Copyright:
© 1999 American Society of Mechanical Engineers (ASME). All rights reserved.
PY - 1999
Y1 - 1999
N2 - In this contribution a micromachined electrochemically-actuated micro dosing system is presented, which accurately can manipulate fluids in microsystems in the nanoliter range. The driving force to actively dispense liquids is provided by the electrochemical generation of gas bubbles (hydrogen and oxygen) by the electrolysis of an electrolyte. As these bubbles expand, they indirectly drive liquid out of a liquid filled reservoir, which is in hydraulic contact with the electrolyte in the bubble reservoir. The dosing system consists basically of a micromachined charmel/reservoir structure in silicon, realized by dry reactive ion etching (DRIB). On top of this silicon fluidic board, a Pyrex® cover is bonded on which a set of electrodes is structured. These electrodes are applied for the generation of gas bubbles and at the same time, to measure the impedance of the gas/electrolyte mixture that is formed after bubble generation. It will be shown that this measured impedance reflects the gas bubble fraction in the bubble reservoir and that this parameter can be applied in determining the dosed amount of fluid. Besides the integrated sensor/actuator electrodes, measures have been taken to reduce the catalytic back reaction from the hydrogen oxygen gas mixture to water, as have been observed in the past.
AB - In this contribution a micromachined electrochemically-actuated micro dosing system is presented, which accurately can manipulate fluids in microsystems in the nanoliter range. The driving force to actively dispense liquids is provided by the electrochemical generation of gas bubbles (hydrogen and oxygen) by the electrolysis of an electrolyte. As these bubbles expand, they indirectly drive liquid out of a liquid filled reservoir, which is in hydraulic contact with the electrolyte in the bubble reservoir. The dosing system consists basically of a micromachined charmel/reservoir structure in silicon, realized by dry reactive ion etching (DRIB). On top of this silicon fluidic board, a Pyrex® cover is bonded on which a set of electrodes is structured. These electrodes are applied for the generation of gas bubbles and at the same time, to measure the impedance of the gas/electrolyte mixture that is formed after bubble generation. It will be shown that this measured impedance reflects the gas bubble fraction in the bubble reservoir and that this parameter can be applied in determining the dosed amount of fluid. Besides the integrated sensor/actuator electrodes, measures have been taken to reduce the catalytic back reaction from the hydrogen oxygen gas mixture to water, as have been observed in the past.
UR - http://www.scopus.com/inward/record.url?scp=66049101565&partnerID=8YFLogxK
U2 - 10.1115/IMECE1999-0296
DO - 10.1115/IMECE1999-0296
M3 - Conference contribution
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 391
EP - 395
BT - Micro-Electro-Mechanical Systems (MEMS)
PB - American Society of Mechanical Engineers
CY - Nashville, USA
T2 - ASME International Mechanical Engineering Congress & Exposition, IMECE 1999
Y2 - 14 November 1999 through 16 November 1999
ER -