| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings of Transducers 99, 10th International Conference on Solid-State Sensors and Actuators |
| Place of Publication | Sendai, Japan |
| Pages | 880-881 |
| Number of pages | 2 |
| Publication status | Published - 7 Jun 1999 |
Keywords
- METIS-113817
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