An electrochemically actuated microvalve

Cristina Neagu, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, J.J. Kelly

Research output: Other contributionOther research output

Original languageEnglish
Place of PublicationDish Hotel, Enschede
Publication statusPublished - 5 Jun 1996

Cite this

Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C., & Kelly, J. J. (1996, Jun 5). An electrochemically actuated microvalve. Dish Hotel, Enschede.