An electrochemically actuated microvalve

C.R. Neagu; J.G.E. Gardeniers; M.C. Elwenspoek; J.H.J. Fluitman

An electrochemically actuated microvalve

C.R. Neagu, J.G.E. Gardeniers, M.C. Elwenspoek, J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	ACTUATOR 96: conference proceedings
Subtitle of host publication	5th International Conference on New Actuators, 26-28 June, 1996, Bremen, Germany
Editors	Hubert Borgmann
Place of Publication	Bremen, Germany
Publisher	AXON Technology Consult
Pages	41-44
Publication status	Published - 26 Jun 1996
Event	5th International Conference on New Actuators, ACTUATOR 1996 - Bremen, Germany Duration: 26 Jun 1996 → 28 Jun 1996 Conference number: 5

Conference

Conference	5th International Conference on New Actuators, ACTUATOR 1996
Abbreviated title	ACTUATOR
Country/Territory	Germany
City	Bremen
Period	26/06/96 → 28/06/96

Cite this

@inproceedings{ebea5377002740c4bc27e8f9eeaf73b4,

title = "An electrochemically actuated microvalve",

author = "C.R. Neagu and J.G.E. Gardeniers and M.C. Elwenspoek and J.H.J. Fluitman",

year = "1996",

month = jun,

day = "26",

language = "English",

pages = "41--44",

editor = "Hubert Borgmann",

booktitle = "ACTUATOR 96: conference proceedings",

publisher = "AXON Technology Consult",

note = "5th International Conference on New Actuators, ACTUATOR 1996, ACTUATOR ; Conference date: 26-06-1996 Through 28-06-1996",

}

Neagu, CR, Gardeniers, JGE, Elwenspoek, MC & Fluitman, JHJ 1996, An electrochemically actuated microvalve. in H Borgmann (ed.), ACTUATOR 96: conference proceedings: 5th International Conference on New Actuators, 26-28 June, 1996, Bremen, Germany. AXON Technology Consult, Bremen, Germany, pp. 41-44, 5th International Conference on New Actuators, ACTUATOR 1996, Bremen, Bremen, Germany, 26/06/96.

An electrochemically actuated microvalve. / Neagu, C.R.; Gardeniers, J.G.E.; Elwenspoek, M.C. et al.
ACTUATOR 96: conference proceedings: 5th International Conference on New Actuators, 26-28 June, 1996, Bremen, Germany. ed. / Hubert Borgmann. Bremen, Germany: AXON Technology Consult, 1996. p. 41-44.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - An electrochemically actuated microvalve

AU - Neagu, C.R.

AU - Gardeniers, J.G.E.

AU - Elwenspoek, M.C.

AU - Fluitman, J.H.J.

N1 - Conference code: 5

PY - 1996/6/26

Y1 - 1996/6/26

M3 - Conference contribution

SP - 41

EP - 44

BT - ACTUATOR 96: conference proceedings

A2 - Borgmann, Hubert

PB - AXON Technology Consult

CY - Bremen, Germany

T2 - 5th International Conference on New Actuators, ACTUATOR 1996

Y2 - 26 June 1996 through 28 June 1996

ER -