An electrochemically actuated microvalve

C.R. Neagu, J.G.E. Gardeniers, M.C. Elwenspoek, J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationACTUATOR 96: conference proceedings
Subtitle of host publication5th International Conference on New Actuators, 26-28 June, 1996, Bremen, Germany
EditorsHubert Borgmann
Place of PublicationBremen, Germany
PublisherAXON Technology Consult
Pages41-44
Publication statusPublished - 26 Jun 1996
Event5th International Conference on New Actuators, ACTUATOR 1996 - Bremen, Germany
Duration: 26 Jun 199628 Jun 1996
Conference number: 5

Conference

Conference5th International Conference on New Actuators, ACTUATOR 1996
Abbreviated titleACTUATOR
CountryGermany
CityBremen
Period26/06/9628/06/96

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