An electrochemically actuated microvalve

C.R. Neagu, J.G.E. Gardeniers, M.C. Elwenspoek, J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationACTUATOR 96: conference proceedings
Subtitle of host publication5th International Conference on New Actuators, 26-28 June, 1996, Bremen, Germany
EditorsHubert Borgmann
Place of PublicationBremen, Germany
PublisherAXON Technology Consult
Pages41-44
Publication statusPublished - 26 Jun 1996

Cite this

Neagu, C. R., Gardeniers, J. G. E., Elwenspoek, M. C., & Fluitman, J. H. J. (1996). An electrochemically actuated microvalve. In H. Borgmann (Ed.), ACTUATOR 96: conference proceedings: 5th International Conference on New Actuators, 26-28 June, 1996, Bremen, Germany (pp. 41-44). Bremen, Germany: AXON Technology Consult.