An electron-multiplying 'Micromegas' grid made in silicon wafer post-processing technology

M.A. Chefdeville, P. Colas, Y. Giomataris, H. van der Graaf, E.H.M. Heijne, S. van der Putten, Cora Salm, Jurriaan Schmitz, Sander M. Smits, J. Timmermans, J.L. Visschers

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    Abstract

    A technology for manufacturing an aluminium grid onto a silicon wafer has been developed. The grid is fixed parallel and precisely to the wafer (anode) surface at a distance of 50 μm by means of insulating pillars. When some 400 V are applied between the grid and (anode) wafer, gas multiplication occurs: primary electrons from the drift space above the grid enter the holes and cause electron avalanches in the high-field region between the grid and the anode. Production and operational characteristics of the device are described. With this newly developed technology, CMOS (pixel) readout chips can be covered with a gas multiplication grid. Such a chip forms, together with the grid, an integrated device which can be applied as readout in a wide field of gaseous detectors.
    Original languageEnglish
    Title of host publicationProceedings 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005
    Place of PublicationVeldhoven, The Netherlands
    PublisherSTW
    Pages139-142
    Number of pages4
    ISBN (Print)90-73461-50-2
    Publication statusPublished - Nov 2005
    Event8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2005 - Veldhoven, Netherlands
    Duration: 17 Nov 200518 Nov 2005
    Conference number: 8

    Workshop

    Workshop8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2005
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period17/11/0518/11/05

    Keywords

    • Microelectrode
    • Microsensors
    • Terms—Electron gas multiplication
    • Wafer post-processing
    • Integrated grid
    • MICROMEGAS
    • SU-8
    • Wafer-scale integration
    • SC-CICC: Characterization of IC Components

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  • Cite this

    Chefdeville, M. A., Colas, P., Giomataris, Y., van der Graaf, H., Heijne, E. H. M., van der Putten, S., ... Visschers, J. L. (2005). An electron-multiplying 'Micromegas' grid made in silicon wafer post-processing technology. In Proceedings 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (pp. 139-142). Veldhoven, The Netherlands: STW.