An electrostatic lower stator axial-gap polysilicon wobble motor part II: Fabrication and performance

R. Legtenberg; Johan W. Berenschot; J.J.J. van Baar; Michael Curt Elwenspoek

doi:10.1109/84.661388

An electrostatic lower stator axial-gap polysilicon wobble motor part II: Fabrication and performance

R. Legtenberg, Johan W. Berenschot, J.J.J. van Baar, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

This paper presents the fabrication and first performance characteristics of electrostatically driven axial-gap polysilicon wobble motors. The fabrication is based on a four mask process using polysilicon surface-micromachining techniques. Three twelve-stator-pole wobble motor designs have been realized with rotor radii of 50 and 100 μm. Motors have been operated successfully at driving voltages as low as 6 V at speeds up to 150 rpm. The motor performance is characterized by gear ratio measurements and measuring starting and stopping voltages. Motor lifetimes of several million wobble cycles, comparable to operating times of several hours, have been obtained

Original language	English
Pages (from-to)	87-93
Number of pages	7
Journal	Journal of microelectromechanical systems
Volume	7
Issue number	1
DOIs	https://doi.org/10.1109/84.661388
Publication status	Published - Mar 1998

Keywords

EWI-13464
IR-24830
METIS-129631

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title = "An electrostatic lower stator axial-gap polysilicon wobble motor part II: Fabrication and performance",

abstract = "This paper presents the fabrication and first performance characteristics of electrostatically driven axial-gap polysilicon wobble motors. The fabrication is based on a four mask process using polysilicon surface-micromachining techniques. Three twelve-stator-pole wobble motor designs have been realized with rotor radii of 50 and 100 μm. Motors have been operated successfully at driving voltages as low as 6 V at speeds up to 150 rpm. The motor performance is characterized by gear ratio measurements and measuring starting and stopping voltages. Motor lifetimes of several million wobble cycles, comparable to operating times of several hours, have been obtained",

keywords = "EWI-13464, IR-24830, METIS-129631",

author = "R. Legtenberg and Berenschot, {Johan W.} and {van Baar}, J.J.J. and Elwenspoek, {Michael Curt}",

year = "1998",

month = mar,

doi = "10.1109/84.661388",

language = "English",

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pages = "87--93",

journal = "Journal of microelectromechanical systems",

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T1 - An electrostatic lower stator axial-gap polysilicon wobble motor part II: Fabrication and performance

AU - Legtenberg, R.

AU - Berenschot, Johan W.

AU - van Baar, J.J.J.

AU - Elwenspoek, Michael Curt

PY - 1998/3

Y1 - 1998/3

N2 - This paper presents the fabrication and first performance characteristics of electrostatically driven axial-gap polysilicon wobble motors. The fabrication is based on a four mask process using polysilicon surface-micromachining techniques. Three twelve-stator-pole wobble motor designs have been realized with rotor radii of 50 and 100 μm. Motors have been operated successfully at driving voltages as low as 6 V at speeds up to 150 rpm. The motor performance is characterized by gear ratio measurements and measuring starting and stopping voltages. Motor lifetimes of several million wobble cycles, comparable to operating times of several hours, have been obtained

AB - This paper presents the fabrication and first performance characteristics of electrostatically driven axial-gap polysilicon wobble motors. The fabrication is based on a four mask process using polysilicon surface-micromachining techniques. Three twelve-stator-pole wobble motor designs have been realized with rotor radii of 50 and 100 μm. Motors have been operated successfully at driving voltages as low as 6 V at speeds up to 150 rpm. The motor performance is characterized by gear ratio measurements and measuring starting and stopping voltages. Motor lifetimes of several million wobble cycles, comparable to operating times of several hours, have been obtained

KW - EWI-13464

KW - IR-24830

KW - METIS-129631

U2 - 10.1109/84.661388

DO - 10.1109/84.661388

M3 - Article

VL - 7

SP - 87

EP - 93

JO - Journal of microelectromechanical systems

JF - Journal of microelectromechanical systems

SN - 1057-7157

IS - 1

ER -

An electrostatic lower stator axial-gap polysilicon wobble motor part II: Fabrication and performance

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Keywords

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