An electrostatic lower stator axial gap wobble motor: design and fabrication

Rob Legtenberg, Erwin Berenschot, John van Baar, Theo Lammerink, Miko Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    3 Citations (Scopus)
    72 Downloads (Pure)

    Abstract

    The fabrication, initial modelling and first results of an electrostatic lower stator axial gap wobble motor are presented. The four mask fabrication process is based on polysilicon surface micromachining techniques. Three to twelve stator pole wobble motor designs have been realized with rotor radii of 50 and 100 micrometer. A theoretical model predicts torque generations in the nNm range at high electrostatic fields. Motors have typically been operated between 10 and 20 Volts. Initial experimental results are presented.
    Original languageEnglish
    Title of host publicationProceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages404-407
    Number of pages4
    ISBN (Print)91-630-3473-5
    DOIs
    Publication statusPublished - 25 Jun 1995
    EventTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden
    Duration: 25 Jun 199529 Jun 1995
    Conference number: 9

    Conference

    ConferenceTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
    CountrySweden
    CityStockholm
    Period25/06/9529/06/95

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