An electrostatic lower stator axial gap wobble motor: design and fabrication

Rob Legtenberg; Erwin Berenschot; John van Baar; Theo Lammerink; Miko Elwenspoek

doi:10.1109/SENSOR.1995.721832

An electrostatic lower stator axial gap wobble motor: design and fabrication

Rob Legtenberg
, Erwin Berenschot
, John van Baar
, Theo Lammerink
, Miko Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

247 Downloads (Pure)

Abstract

The fabrication, initial modelling and first results of an electrostatic lower stator axial gap wobble motor are presented. The four mask fabrication process is based on polysilicon surface micromachining techniques. Three to twelve stator pole wobble motor designs have been realized with rotor radii of 50 and 100 micrometer. A theoretical model predicts torque generations in the nNm range at high electrostatic fields. Motors have typically been operated between 10 and 20 Volts. Initial experimental results are presented.

Original language	English
Title of host publication	Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	404-407
Number of pages	4
ISBN (Print)	91-630-3473-5
DOIs	https://doi.org/10.1109/SENSOR.1995.721832
Publication status	Published - 25 Jun 1995
Event	Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995 Conference number: 9

Conference

Conference	Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
Country/Territory	Sweden
City	Stockholm
Period	25/06/95 → 29/06/95

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Access to Document

10.1109/SENSOR.1995.721832

Legtenberg1995electrostaticFinal published version, 636 KB

Cite this

@inproceedings{5a73eb0af0d84aff90bf39fa86df3af1,

title = "An electrostatic lower stator axial gap wobble motor: design and fabrication",

abstract = "The fabrication, initial modelling and first results of an electrostatic lower stator axial gap wobble motor are presented. The four mask fabrication process is based on polysilicon surface micromachining techniques. Three to twelve stator pole wobble motor designs have been realized with rotor radii of 50 and 100 micrometer. A theoretical model predicts torque generations in the nNm range at high electrostatic fields. Motors have typically been operated between 10 and 20 Volts. Initial experimental results are presented.",

author = "Rob Legtenberg and Erwin Berenschot and \{van Baar\}, John and Theo Lammerink and Miko Elwenspoek",

year = "1995",

month = jun,

day = "25",

doi = "10.1109/SENSOR.1995.721832",

language = "English",

isbn = "91-630-3473-5",

pages = "404--407",

booktitle = "Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95",

publisher = "IEEE",

address = "United States",

note = "Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors ; Conference date: 25-06-1995 Through 29-06-1995",

}

Legtenberg, R , Berenschot, E, van Baar, J, Lammerink, T & Elwenspoek, M 1995, An electrostatic lower stator axial gap wobble motor: design and fabrication. in Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. IEEE, Piscataway, NJ, pp. 404-407, Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors, Stockholm, Sweden, 25/06/95. https://doi.org/10.1109/SENSOR.1995.721832

An electrostatic lower stator axial gap wobble motor: design and fabrication. / Legtenberg, Rob ; Berenschot, Erwin; van Baar, John et al.
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. Piscataway, NJ: IEEE, 1995. p. 404-407.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - An electrostatic lower stator axial gap wobble motor

T2 - Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors

AU - Legtenberg, Rob

AU - Berenschot, Erwin

AU - van Baar, John

AU - Lammerink, Theo

AU - Elwenspoek, Miko

N1 - Conference code: 9

PY - 1995/6/25

Y1 - 1995/6/25

N2 - The fabrication, initial modelling and first results of an electrostatic lower stator axial gap wobble motor are presented. The four mask fabrication process is based on polysilicon surface micromachining techniques. Three to twelve stator pole wobble motor designs have been realized with rotor radii of 50 and 100 micrometer. A theoretical model predicts torque generations in the nNm range at high electrostatic fields. Motors have typically been operated between 10 and 20 Volts. Initial experimental results are presented.

AB - The fabrication, initial modelling and first results of an electrostatic lower stator axial gap wobble motor are presented. The four mask fabrication process is based on polysilicon surface micromachining techniques. Three to twelve stator pole wobble motor designs have been realized with rotor radii of 50 and 100 micrometer. A theoretical model predicts torque generations in the nNm range at high electrostatic fields. Motors have typically been operated between 10 and 20 Volts. Initial experimental results are presented.

U2 - 10.1109/SENSOR.1995.721832

DO - 10.1109/SENSOR.1995.721832

M3 - Conference contribution

SN - 91-630-3473-5

SP - 404

EP - 407

BT - Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95

PB - IEEE

CY - Piscataway, NJ

Y2 - 25 June 1995 through 29 June 1995

ER -

An electrostatic lower stator axial gap wobble motor: design and fabrication

Abstract

Conference

UN SDGs

Access to Document

Fingerprint

Cite this