An experimental and modelling study of the tungsten LPCVD growth kinetics from H2-WF6 at low WF6 partial pressures, tungsten...... applications

C.R. Kleijn, A. Hasper, J. Holleman, T.J. Feng

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationMaterials Research Society
    Place of PublicationPittsburg, USA
    Pages109-116
    Number of pages8
    Publication statusPublished - 1 Sep 1990

    Keywords

    • METIS-114020

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