An experimental and modelling study of the tungsten LPCVD growth kinetics from H2-WF6 at low WF6 partial pressures, tungsten...... applications

C.R. Kleijn; A. Hasper; J. Holleman; T.J. Feng

An experimental and modelling study of the tungsten LPCVD growth kinetics from H2-WF6 at low WF6 partial pressures, tungsten...... applications

C.R. Kleijn, A. Hasper, J. Holleman, T.J. Feng

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Materials Research Society
Place of Publication	Pittsburg, USA
Pages	109-116
Number of pages	8
Publication status	Published - 1 Sept 1990

Keywords

METIS-114020

Cite this

@inproceedings{870002069a6f42a9a71c6e4049037f61,

title = "An experimental and modelling study of the tungsten LPCVD growth kinetics from H2-WF6 at low WF6 partial pressures, tungsten...... applications",

keywords = "METIS-114020",

author = "C.R. Kleijn and A. Hasper and J. Holleman and T.J. Feng",

year = "1990",

month = sep,

day = "1",

language = "English",

pages = "109--116",

booktitle = "Materials Research Society",

}

An experimental and modelling study of the tungsten LPCVD growth kinetics from H2-WF6 at low WF6 partial pressures, tungsten...... applications. / Kleijn, C.R.; Hasper, A.; Holleman, J. et al.
Materials Research Society. Pittsburg, USA, 1990. p. 109-116.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - An experimental and modelling study of the tungsten LPCVD growth kinetics from H2-WF6 at low WF6 partial pressures, tungsten...... applications

AU - Kleijn, C.R.

AU - Hasper, A.

AU - Holleman, J.

AU - Feng, T.J.

PY - 1990/9/1

Y1 - 1990/9/1

KW - METIS-114020

M3 - Conference contribution

SP - 109

EP - 116

BT - Materials Research Society

CY - Pittsburg, USA

ER -