An IC-compatible polyimide pressure sensor with capacitive readout

M. Pedersen*, M.G.H. Meijerink, W. Olthuis, P. Bergveld

*Corresponding author for this work

    Research output: Contribution to journalArticleAcademicpeer-review

    15 Citations (Scopus)
    98 Downloads (Pure)

    Abstract

    A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device potentially can be integrated on one chip with a suitable signal-conditioning circuit. A sensor for a differential pressure of ±1 bar has been fabricated and tested with a frequency-modulated detection circuit, and good agreement is found with the theoretical model of the sensor. A nominal sensitivity ¿C/C of 17% has been measured for a positive differential pressure of 1 bar. The resolution of the complete detection system is 2.5 mbar (250 Pa).
    Original languageEnglish
    Pages (from-to)163-168
    JournalSensors and actuators. A: Physical
    Volume63
    Issue number3
    DOIs
    Publication statusPublished - 1997

    Keywords

    • Capacitive sensors
    • Differential sensors
    • Integrated sensors
    • Polyimide
    • Pressure sensors

    Fingerprint Dive into the research topics of 'An IC-compatible polyimide pressure sensor with capacitive readout'. Together they form a unique fingerprint.

    Cite this