An IC-compatible polyimide pressure sensor with capacitive readout

M. Pedersen*, M.G.H. Meijerink, W. Olthuis, P. Bergveld

*Corresponding author for this work

    Research output: Contribution to journalArticleAcademicpeer-review

    16 Citations (Scopus)
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    A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device potentially can be integrated on one chip with a suitable signal-conditioning circuit. A sensor for a differential pressure of ±1 bar has been fabricated and tested with a frequency-modulated detection circuit, and good agreement is found with the theoretical model of the sensor. A nominal sensitivity ¿C/C of 17% has been measured for a positive differential pressure of 1 bar. The resolution of the complete detection system is 2.5 mbar (250 Pa).
    Original languageEnglish
    Pages (from-to)163-168
    JournalSensors and Actuators A: Physical
    Issue number3
    Publication statusPublished - 1997


    • Capacitive sensors
    • Differential sensors
    • Integrated sensors
    • Polyimide
    • Pressure sensors


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