An IC-compatible polyimide pressure sensor with capacitive readout

M. Pedersen; M.G.H. Meijerink; W. Olthuis; P. Bergveld

doi:10.1016/S0924-4247(97)80500-6

An IC-compatible polyimide pressure sensor with capacitive readout

M. Pedersen^*, M.G.H. Meijerink, W. Olthuis, P. Bergveld

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

16 Citations (Scopus)

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Abstract

A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device potentially can be integrated on one chip with a suitable signal-conditioning circuit. A sensor for a differential pressure of ±1 bar has been fabricated and tested with a frequency-modulated detection circuit, and good agreement is found with the theoretical model of the sensor. A nominal sensitivity ¿C/C of 17% has been measured for a positive differential pressure of 1 bar. The resolution of the complete detection system is 2.5 mbar (250 Pa).

Original language	English
Pages (from-to)	163-168
Journal	Sensors and Actuators A: Physical
Volume	63
Issue number	3
DOIs	https://doi.org/10.1016/S0924-4247(97)80500-6
Publication status	Published - 1997

Keywords

Capacitive sensors
Differential sensors
Integrated sensors
Polyimide
Pressure sensors

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10.1016/S0924-4247(97)80500-6

Pedersen97ic-compatibleFinal published version, 411 KB

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title = "An IC-compatible polyimide pressure sensor with capacitive readout",

abstract = "A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device potentially can be integrated on one chip with a suitable signal-conditioning circuit. A sensor for a differential pressure of ±1 bar has been fabricated and tested with a frequency-modulated detection circuit, and good agreement is found with the theoretical model of the sensor. A nominal sensitivity ¿C/C of 17% has been measured for a positive differential pressure of 1 bar. The resolution of the complete detection system is 2.5 mbar (250 Pa).",

keywords = "Capacitive sensors, Differential sensors, Integrated sensors, Polyimide, Pressure sensors",

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AU - Pedersen, M.

AU - Meijerink, M.G.H.

AU - Olthuis, W.

AU - Bergveld, P.

PY - 1997

Y1 - 1997

N2 - A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device potentially can be integrated on one chip with a suitable signal-conditioning circuit. A sensor for a differential pressure of ±1 bar has been fabricated and tested with a frequency-modulated detection circuit, and good agreement is found with the theoretical model of the sensor. A nominal sensitivity ¿C/C of 17% has been measured for a positive differential pressure of 1 bar. The resolution of the complete detection system is 2.5 mbar (250 Pa).

AB - A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device potentially can be integrated on one chip with a suitable signal-conditioning circuit. A sensor for a differential pressure of ±1 bar has been fabricated and tested with a frequency-modulated detection circuit, and good agreement is found with the theoretical model of the sensor. A nominal sensitivity ¿C/C of 17% has been measured for a positive differential pressure of 1 bar. The resolution of the complete detection system is 2.5 mbar (250 Pa).

KW - Capacitive sensors

KW - Differential sensors

KW - Integrated sensors

KW - Polyimide

KW - Pressure sensors

U2 - 10.1016/S0924-4247(97)80500-6

DO - 10.1016/S0924-4247(97)80500-6

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EP - 168

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 3

ER -

An IC-compatible polyimide pressure sensor with capacitive readout

Abstract

Keywords

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