An improved discharge technique for excimer lasers

J.W. Gerritsen, A.L. Keet, G.J. Ernst, W.J. Witteman

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The further development of discharge excimer lasers depends upon a better degree of control over the discharge stability. A problem is the large difference between the breakdown and steady-state voltage which requires a time dependent impedance of the power circuit. Further the large attachment rates of halogens like HCl, causing electric field disturbances require a short rise time of the applied current pulse. A large effort has been expended towards this goal by researchers since the early development of discharge excimer lasers.
Original languageUndefined
Pages (from-to)395-396
JournalOptics communications
Issue number5-6
Publication statusPublished - 1990


  • IR-72674

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