The further development of discharge excimer lasers depends upon a better degree of control over the discharge stability. A problem is the large difference between the breakdown and steady-state voltage which requires a time dependent impedance of the power circuit. Further the large attachment rates of halogens like HCl, causing electric field disturbances require a short rise time of the applied current pulse. A large effort has been expended towards this goal by researchers since the early development of discharge excimer lasers.
Gerritsen, J. W., Keet, A. L., Ernst, G. J., & Witteman, W. J. (1990). An improved discharge technique for excimer lasers. Optics communications, 77(5-6), 395-396. https://doi.org/10.1016/0030-4018(90)90132-D