An improved discharge technique for excimer lasers

The further development of discharge excimer lasers depends upon a better degree of control over the discharge stability. A problem is the large difference between the breakdown and steady-state voltage which requires a time dependent impedance of the power circuit. Further the large attachment rates of halogens like HCl, causing electric field disturbances require a short rise time of the applied current pulse. A large effort has been expended towards this goal by researchers since the early development of discharge excimer lasers.