Original language | Undefined |
---|---|
Pages (from-to) | L23-L26 |
Number of pages | 4 |
Journal | Journal of micromechanics and microengineering |
Volume | 7 |
Issue number | 1 |
Publication status | Published - 1998 |
Keywords
- METIS-111539
G.J. Veldhuis, J.H. Berends, Rene Heideman, Paul Lambeck
Research output: Contribution to journal › Article › Academic › peer-review
Original language | Undefined |
---|---|
Pages (from-to) | L23-L26 |
Number of pages | 4 |
Journal | Journal of micromechanics and microengineering |
Volume | 7 |
Issue number | 1 |
Publication status | Published - 1998 |