| Original language | Undefined |
|---|---|
| Pages (from-to) | L23-L26 |
| Number of pages | 4 |
| Journal | Journal of micromechanics and microengineering |
| Volume | 7 |
| Issue number | 1 |
| Publication status | Published - 1998 |
Keywords
- METIS-111539
G.J. Veldhuis, J.H. Berends, Rene Heideman, Paul Lambeck
Research output: Contribution to journal › Article › Academic › peer-review
| Original language | Undefined |
|---|---|
| Pages (from-to) | L23-L26 |
| Number of pages | 4 |
| Journal | Journal of micromechanics and microengineering |
| Volume | 7 |
| Issue number | 1 |
| Publication status | Published - 1998 |