An integrated optical method to readout µ-Coriolis mass flow sensors

Anneirudh Sundararajan*, Remco J. Wiegerink, Remco G.P. Sanders, Qihui Yu, Joost C. Lötters

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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This paper presents a novel readout for a µ-Coriolis mass flow sensor based on a differential optical reflective method, using a vertical-cavity surface-emitting laser (VCSEL) and two photodiodes (PD). The new readout detects change in applied mass flow rate by measuring the phase shift between the two photodiode signals. Such a setup offers a non-contact and robust sensing method. Measurements are presented for mass flow of DI-water up to 10 gram/hour resulting in a phase shift of 8.7 degrees.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XXII
EditorsHans Zappe, Wibool Piyawattanametha, Wibool Piyawattanametha, Yong-Hwa Park
Number of pages5
ISBN (Electronic)9781510659742
ISBN (Print)9781510659735
Publication statusPublished - 15 Mar 2023
EventMOEMS and Miniaturized Systems XXII 2023 - San Francisco, United States
Duration: 30 Jan 202331 Jan 2023

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceMOEMS and Miniaturized Systems XXII 2023
Country/TerritoryUnited States
CitySan Francisco


  • 2024 OA procedure
  • MEMS
  • microfluidics
  • PD
  • µ-Coriolis mass flow sensor
  • differential optical readout


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