@inproceedings{9800ccb3a3044b369a70e892a7cde6bf,
title = "An integrated optical method to readout µ-Coriolis mass flow sensors",
abstract = "This paper presents a novel readout for a µ-Coriolis mass flow sensor based on a differential optical reflective method, using a vertical-cavity surface-emitting laser (VCSEL) and two photodiodes (PD). The new readout detects change in applied mass flow rate by measuring the phase shift between the two photodiode signals. Such a setup offers a non-contact and robust sensing method. Measurements are presented for mass flow of DI-water up to 10 gram/hour resulting in a phase shift of 8.7 degrees.",
keywords = "2024 OA procedure, MEMS, Microfluidics, PD, VCSEL, µ-Coriolis mass flow sensor, Differential optical readout",
author = "Anneirudh Sundararajan and Wiegerink, {Remco J.} and Sanders, {Remco G.P.} and Qihui Yu and L{\"o}tters, {Joost C.}",
note = "Publisher Copyright: {\textcopyright} 2023 SPIE.; MOEMS and Miniaturized Systems XXII 2023 ; Conference date: 30-01-2023 Through 31-01-2023",
year = "2023",
month = mar,
day = "15",
doi = "10.1117/12.2650589",
language = "English",
isbn = "9781510659735",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Hans Zappe and Wibool Piyawattanametha and Wibool Piyawattanametha and Yong-Hwa Park",
booktitle = "MOEMS and Miniaturized Systems XXII",
address = "United States",
}