An integrated single photon detector array using porous anodic alumina

Joost Melai; Cora Salm; Jurriaan Schmitz; Sander Smits; Jan Visschers

An integrated single photon detector array using porous anodic alumina

Joost Melai, Cora Salm, Jurriaan Schmitz, Sander Smits, Jan Visschers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

This paper outlines a single photon sensitive detector array. The detector structure is made via CMOS compatible wafer-scale post-processing. The total system comprises a CMOS imaging chip with charge sensitive pixels, an electron multiplier and a photo-cathode. The electron multiplication is achieved by operating a thick layer of integrated porous anodic alumina as an MCP. Material and geometry considerations are given as well as some first experimental results on the required processing steps and on an intermediate experiment with discrete samples of porous anodic alumina.

Original language	English
Title of host publication	Proceedings 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2006
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	389-393
Number of pages	5
ISBN (Print)	90-73461-44-8
Publication status	Published - 27 Nov 2006
Event	9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2006 - Veldhoven, Netherlands Duration: 23 Nov 2006 → 24 Nov 2006 Conference number: 9

Workshop

Workshop	9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2006
Country/Territory	Netherlands
City	Veldhoven
Period	23/11/06 → 24/11/06

Keywords

SC-RID: Radiation Imaging detectors
CMOS compatibility
Electron multipliers
Micro-channel plate
Photon detection
Porous anodic alumina
Waferscale post-processing

Cite this

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title = "An integrated single photon detector array using porous anodic alumina",

abstract = "This paper outlines a single photon sensitive detector array. The detector structure is made via CMOS compatible wafer-scale post-processing. The total system comprises a CMOS imaging chip with charge sensitive pixels, an electron multiplier and a photo-cathode. The electron multiplication is achieved by operating a thick layer of integrated porous anodic alumina as an MCP. Material and geometry considerations are given as well as some first experimental results on the required processing steps and on an intermediate experiment with discrete samples of porous anodic alumina.",

keywords = "SC-RID: Radiation Imaging detectors, CMOS compatibility, Electron multipliers, Micro-channel plate, Photon detection, Porous anodic alumina, Waferscale post-processing",

author = "Joost Melai and Cora Salm and Jurriaan Schmitz and Sander Smits and Jan Visschers",

year = "2006",

month = nov,

day = "27",

language = "English",

isbn = "90-73461-44-8",

pages = "389--393",

booktitle = "Proceedings 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2006",

publisher = "STW",

note = "9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2006 ; Conference date: 23-11-2006 Through 24-11-2006",

}

Melai, J, Salm, C , Schmitz, J , Smits, S & Visschers, J 2006, An integrated single photon detector array using porous anodic alumina. in Proceedings 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2006. STW, Utrecht, The Netherlands, pp. 389-393, 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2006, Veldhoven, Netherlands, 23/11/06.

An integrated single photon detector array using porous anodic alumina. / Melai, Joost; Salm, Cora ; Schmitz, Jurriaan ; Smits, Sander; Visschers, Jan.

Proceedings 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2006. Utrecht, The Netherlands : STW, 2006. p. 389-393.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - An integrated single photon detector array using porous anodic alumina

AU - Melai, Joost

AU - Salm, Cora

AU - Schmitz, Jurriaan

AU - Smits, Sander

AU - Visschers, Jan

N1 - Conference code: 9

PY - 2006/11/27

Y1 - 2006/11/27

N2 - This paper outlines a single photon sensitive detector array. The detector structure is made via CMOS compatible wafer-scale post-processing. The total system comprises a CMOS imaging chip with charge sensitive pixels, an electron multiplier and a photo-cathode. The electron multiplication is achieved by operating a thick layer of integrated porous anodic alumina as an MCP. Material and geometry considerations are given as well as some first experimental results on the required processing steps and on an intermediate experiment with discrete samples of porous anodic alumina.

AB - This paper outlines a single photon sensitive detector array. The detector structure is made via CMOS compatible wafer-scale post-processing. The total system comprises a CMOS imaging chip with charge sensitive pixels, an electron multiplier and a photo-cathode. The electron multiplication is achieved by operating a thick layer of integrated porous anodic alumina as an MCP. Material and geometry considerations are given as well as some first experimental results on the required processing steps and on an intermediate experiment with discrete samples of porous anodic alumina.

KW - SC-RID: Radiation Imaging detectors

KW - CMOS compatibility

KW - Electron multipliers

KW - Micro-channel plate

KW - Photon detection

KW - Porous anodic alumina

KW - Waferscale post-processing

M3 - Conference contribution

SN - 90-73461-44-8

SP - 389

EP - 393

BT - Proceedings 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2006

PB - STW

CY - Utrecht, The Netherlands

T2 - 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2006

Y2 - 23 November 2006 through 24 November 2006

ER -

An integrated single photon detector array using porous anodic alumina

Abstract

Workshop

Keywords

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