An integrated single photon detector array using porous anodic alumina

J. Melai, Cora Salm, Jurriaan Schmitz, Sander M. Smits, J.L. Visschers

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Abstract

    Abstract—This paper outlines a single photon sensitive detector array. The detector structure is made via CMOS compatible wafer-scale post-processing. The total system comprises a CMOS imaging chip with charge sensitive pixels, an electron multiplier and a photo-cathode. The electron multiplication is achieved by operating a thick layer of integrated porous anodic alumina as an MCP. Material and geometry considerations are given as well as some first experimental results on the required processing steps and on an intermediate experiment with discrete samples of porous anodic alumina.
    Original languageUndefined
    Title of host publicationProceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages389-393
    Number of pages5
    ISBN (Print)90-73461-44-8
    Publication statusPublished - 27 Nov 2006

    Publication series

    Name
    PublisherTechnology Foundation STW
    Number10

    Keywords

    • SC-RID: Radiation Imaging detectors
    • METIS-237712
    • EWI-8418
    • IR-63764

    Cite this

    Melai, J., Salm, C., Schmitz, J., Smits, S. M., & Visschers, J. L. (2006). An integrated single photon detector array using porous anodic alumina. In Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006 (pp. 389-393). Utrecht, The Netherlands: STW.