An intensive study of LPCVD silicon morphology and texture for non-volatile memory application

J.H. Klootwijk, H. van Kranenburg, P.H. Woerlee, Hans Wallinga

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Pages-
    Publication statusPublished - 14 Jun 1995
    EventMESA Dag 1995 - Dish Hotel, Enschede, Netherlands
    Duration: 14 Jun 199514 Jun 1995

    Other

    OtherMESA Dag 1995
    CountryNetherlands
    CityEnschede
    Period14/06/9514/06/95
    Other(MESA Day/Meeting)

    Keywords

    • METIS-114870

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