An intensive study of LPCVD silicon morphology and texture for non-volatile memory application

J.H. Klootwijk, H. van Kranenburg, P.H. Woerlee, Hans Wallinga

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 14 Jun 1995
Event	MESA Dag 1995 - Dish Hotel, Enschede, Netherlands Duration: 14 Jun 1995 → 14 Jun 1995

Keywords

@conference{bee8e1c9f0fb4ca6a58b377969602296,

title = "An intensive study of LPCVD silicon morphology and texture for non-volatile memory application",

keywords = "METIS-114870",

author = "J.H. Klootwijk and {van Kranenburg}, H. and P.H. Woerlee and Hans Wallinga",

year = "1995",

month = jun,

day = "14",

language = "English",

pages = "--",

note = "MESA Dag 1995 ; Conference date: 14-06-1995 Through 14-06-1995",

}