An on-wafer fabricated free-chlorine sensor

A. van den Berg*, M. Koudelka-Hep, B.K. van der Schoot, Elisabeth Verney-Norberg, Philippe Krebs, Alain Grisel, Nico F. de Rooij

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
21 Downloads (Pure)

Abstract

A method for on-wafer fabrication of free-chlorine sensors is described. The sensor structure consists of a planar three-electrode electrochemical cell covered with a polyHEMA hydrogel membrane. This membrane is photolithographically patterned on-wafer. In order to guarantee a good adhesion of the membrane to the electrode surface a special oxidation consisting of a treatment in an oxygen plasma has been developed followed by a silanization procedure. The optimal operational polarization voltage for detection of free chlorine was found to be +50 mV vs. SCE. Sensors with membrane thicknesses of 10 and 50 μm were found to give approximately linear calibration curves between 0.1 and 5 mg/l free chlorine, with sensitivities of 2 and 0.4 nA/(mg/l), respectively.

Original languageEnglish
Title of host publicationTransducers '91
Subtitle of host publication1991 International Conference on Solid-State Sensors and Actuators : digest of technical papers
PublisherIEEE
Pages233-236
Number of pages4
ISBN (Print)0-87942-585-7
DOIs
Publication statusPublished - 1 Dec 1991
Externally publishedYes
Event1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States
Duration: 24 Jun 199127 Jun 1991

Conference

Conference1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
Abbreviated titleTRANSDUCERS '91
CountryUnited States
CitySan Francisco
Period24/06/9127/06/91

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