An on-wafer fabricated free-chlorine sensor

A. van den Berg; M. Koudelka-Hep; B.K. van der Schoot; Elisabeth Verney-Norberg; Philippe Krebs; Alain Grisel; Nico F. de Rooij

doi:10.1109/SENSOR.1991.148845

An on-wafer fabricated free-chlorine sensor

A. van den Berg^*
, M. Koudelka-Hep
, B.K. van der Schoot
, Elisabeth Verney-Norberg
, Philippe Krebs
, Alain Grisel
, Nico F. de Rooij

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

83 Downloads (Pure)

Abstract

A method for on-wafer fabrication of free-chlorine sensors is described. The sensor structure consists of a planar three-electrode electrochemical cell covered with a polyHEMA hydrogel membrane. This membrane is photolithographically patterned on-wafer. In order to guarantee a good adhesion of the membrane to the electrode surface a special oxidation consisting of a treatment in an oxygen plasma has been developed followed by a silanization procedure. The optimal operational polarization voltage for detection of free chlorine was found to be +50 mV vs. SCE. Sensors with membrane thicknesses of 10 and 50 μm were found to give approximately linear calibration curves between 0.1 and 5 mg/l free chlorine, with sensitivities of 2 and 0.4 nA/(mg/l), respectively.

Original language	English
Title of host publication	Transducers '91
Subtitle of host publication	1991 International Conference on Solid-State Sensors and Actuators : digest of technical papers
Publisher	IEEE
Pages	233-236
Number of pages	4
ISBN (Print)	0-87942-585-7
DOIs	https://doi.org/10.1109/SENSOR.1991.148845
Publication status	Published - 1 Dec 1991
Externally published	Yes
Event	1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States Duration: 24 Jun 1991 → 27 Jun 1991

Conference

Conference	1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
Abbreviated title	TRANSDUCERS '91
Country/Territory	United States
City	San Francisco
Period	24/06/91 → 27/06/91

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10.1109/SENSOR.1991.148845

VandenBerg1991on-waferFinal published version, 445 KB

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@inproceedings{ecb58804972e455ea17c8f8e57bafbe1,

title = "An on-wafer fabricated free-chlorine sensor",

abstract = "A method for on-wafer fabrication of free-chlorine sensors is described. The sensor structure consists of a planar three-electrode electrochemical cell covered with a polyHEMA hydrogel membrane. This membrane is photolithographically patterned on-wafer. In order to guarantee a good adhesion of the membrane to the electrode surface a special oxidation consisting of a treatment in an oxygen plasma has been developed followed by a silanization procedure. The optimal operational polarization voltage for detection of free chlorine was found to be +50 mV vs. SCE. Sensors with membrane thicknesses of 10 and 50 μm were found to give approximately linear calibration curves between 0.1 and 5 mg/l free chlorine, with sensitivities of 2 and 0.4 nA/(mg/l), respectively.",

author = "\{van den Berg\}, A. and M. Koudelka-Hep and \{van der Schoot\}, B.K. and Elisabeth Verney-Norberg and Philippe Krebs and Alain Grisel and \{de Rooij\}, \{Nico F.\}",

year = "1991",

month = dec,

day = "1",

doi = "10.1109/SENSOR.1991.148845",

language = "English",

isbn = "0-87942-585-7",

pages = "233--236",

booktitle = "Transducers '91",

publisher = "IEEE",

address = "United States",

note = "1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991, TRANSDUCERS '91 ; Conference date: 24-06-1991 Through 27-06-1991",

}

van den Berg, A, Koudelka-Hep, M, van der Schoot, BK, Verney-Norberg, E, Krebs, P, Grisel, A & de Rooij, NF 1991, An on-wafer fabricated free-chlorine sensor. in Transducers '91: 1991 International Conference on Solid-State Sensors and Actuators : digest of technical papers. IEEE, pp. 233-236, 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991, San Francisco, California, United States, 24/06/91. https://doi.org/10.1109/SENSOR.1991.148845

TY - GEN

T1 - An on-wafer fabricated free-chlorine sensor

AU - van den Berg, A.

AU - Koudelka-Hep, M.

AU - van der Schoot, B.K.

AU - Verney-Norberg, Elisabeth

AU - Krebs, Philippe

AU - Grisel, Alain

AU - de Rooij, Nico F.

PY - 1991/12/1

Y1 - 1991/12/1

N2 - A method for on-wafer fabrication of free-chlorine sensors is described. The sensor structure consists of a planar three-electrode electrochemical cell covered with a polyHEMA hydrogel membrane. This membrane is photolithographically patterned on-wafer. In order to guarantee a good adhesion of the membrane to the electrode surface a special oxidation consisting of a treatment in an oxygen plasma has been developed followed by a silanization procedure. The optimal operational polarization voltage for detection of free chlorine was found to be +50 mV vs. SCE. Sensors with membrane thicknesses of 10 and 50 μm were found to give approximately linear calibration curves between 0.1 and 5 mg/l free chlorine, with sensitivities of 2 and 0.4 nA/(mg/l), respectively.

AB - A method for on-wafer fabrication of free-chlorine sensors is described. The sensor structure consists of a planar three-electrode electrochemical cell covered with a polyHEMA hydrogel membrane. This membrane is photolithographically patterned on-wafer. In order to guarantee a good adhesion of the membrane to the electrode surface a special oxidation consisting of a treatment in an oxygen plasma has been developed followed by a silanization procedure. The optimal operational polarization voltage for detection of free chlorine was found to be +50 mV vs. SCE. Sensors with membrane thicknesses of 10 and 50 μm were found to give approximately linear calibration curves between 0.1 and 5 mg/l free chlorine, with sensitivities of 2 and 0.4 nA/(mg/l), respectively.

U2 - 10.1109/SENSOR.1991.148845

DO - 10.1109/SENSOR.1991.148845

M3 - Conference contribution

AN - SCOPUS:0026372170

SN - 0-87942-585-7

SP - 233

EP - 236

BT - Transducers '91

PB - IEEE

T2 - 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991

Y2 - 24 June 1991 through 27 June 1991

ER -

An on-wafer fabricated free-chlorine sensor

Abstract

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