An x-ray preionised discharge pumped ArF laser

L. Feenstra, O.B. Hoekstra, P.J.M. Peters, W.J. Witteman

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings 1997 second IEEE/LEOS Symposium, Benelux chapter
Subtitle of host publicationNovember 26th, 1997, Eindhoven University of Technology, the Netherlands
EditorsFouad Karouta, J.E.M. Haverkort, F.J.J. Kennis
Place of PublicationUtrecht
PublisherSTW
Pages161-164
Number of pages4
ISBN (Print)90-73461-13-8
Publication statusPublished - 26 Nov 1997

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