An XPS comparison of ALD and PLD grown thin AI2O3 layers

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 2 Aug 2003
EventAVS International Conference on Atomic Layer Deposition, ALD 2003 - San Jose, United States
Duration: 2 Aug 20038 Aug 2003
Conference number: 2003

Conference

ConferenceAVS International Conference on Atomic Layer Deposition, ALD 2003
Abbreviated titleALD 2003
CountryUnited States
CitySan Jose
Period2/08/038/08/03

Keywords

  • METIS-214593

Cite this

Zinine, A., Sturm, J. M., Wormeester, H., & Poelsema, B. (2003). An XPS comparison of ALD and PLD grown thin AI2O3 layers. -. Poster session presented at AVS International Conference on Atomic Layer Deposition, ALD 2003, San Jose, United States.