An XPS comparison of ALD and PLD grown thin AI2O3 layers

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 16 Dec 2003
EventFOM-GM Meeting 2003 - Veldhoven, Netherlands
Duration: 16 Dec 200317 Dec 2003

Conference

ConferenceFOM-GM Meeting 2003
CountryNetherlands
CityVeldhoven
Period16/12/0317/12/03

Keywords

  • METIS-214595

Cite this

Zinine, A., Sturm, J. M., Wormeester, H., & Poelsema, B. (2003). An XPS comparison of ALD and PLD grown thin AI2O3 layers. -. Poster session presented at FOM-GM Meeting 2003, Veldhoven, Netherlands.