An XPS comparison of ALD and PLD grown thin AI2O3 layers

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Number of pages1
Publication statusPublished - 16 Dec 2003
EventFOM-GM Meeting 2003 - Veldhoven, Netherlands
Duration: 16 Dec 200317 Dec 2003

Conference

ConferenceFOM-GM Meeting 2003
CountryNetherlands
CityVeldhoven
Period16/12/0317/12/03

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