An XPS comparison of ALD and PLD grown thin AI2O3 layers

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Number of pages1
Publication statusPublished - 2 Aug 2003
EventAVS International Conference on Atomic Layer Deposition, ALD 2003 - San Jose, United States
Duration: 2 Aug 20038 Aug 2003
Conference number: 2003

Conference

ConferenceAVS International Conference on Atomic Layer Deposition, ALD 2003
Abbreviated titleALD 2003
CountryUnited States
CitySan Jose
Period2/08/038/08/03

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