An XPS comparison of ALD and PLD grown thin AI2O3 layers

An XPS comparison of ALD and PLD grown thin AI₂O₃ layers

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 2 Aug 2003
Event	AVS International Conference on Atomic Layer Deposition, ALD 2003 - San Jose, United States Duration: 2 Aug 2003 → 8 Aug 2003 Conference number: 2003

Conference	AVS International Conference on Atomic Layer Deposition, ALD 2003
Abbreviated title	ALD 2003
Country/Territory	United States
City	San Jose
Period	2/08/03 → 8/08/03

An XPS comparison of ALD and PLD grown thin AI₂O₃ layers
Zinine, A., Sturm, M., Wormeester, H. & Poelsema, B., 16 Dec 2003. 1 p.
Research output: Contribution to conference › Poster › Other research output
An XPS comparison of ALD and PLD grown thin Al₂O₃ layers
Zinine, A., Sturm, M., Wormeester, H. & Poelsema, B., 1 Nov 2003. 1 p.
Research output: Contribution to conference › Poster › Other research output

@conference{11617d5b848c4fa2a86e84fb50eed32e,

title = "An XPS comparison of ALD and PLD grown thin AI2O3 layers",

author = "A. Zinine and M. Sturm and H. Wormeester and B. Poelsema",

year = "2003",

month = aug,

day = "2",

language = "English",

note = "AVS International Conference on Atomic Layer Deposition, ALD 2003, ALD 2003 ; Conference date: 02-08-2003 Through 08-08-2003",

}