An XPS comparison of ALD and PLD grown thin Al2O3 layers

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Number of pages1
Publication statusPublished - 1 Nov 2003
Event50th AVS International Symposium 2003 - Baltimore, United States
Duration: 2 Nov 20037 Nov 2003
Conference number: 50

Conference

Conference50th AVS International Symposium 2003
CountryUnited States
CityBaltimore
Period2/11/037/11/03

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