An XPS comparison of ALD and PLD grown thin Al2O3 layers

An XPS comparison of ALD and PLD grown thin Al₂O₃ layers

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 1 Nov 2003
Event	50th AVS International Symposium 2003 - Baltimore, United States Duration: 2 Nov 2003 → 7 Nov 2003 Conference number: 50

Conference	50th AVS International Symposium 2003
Country/Territory	United States
City	Baltimore
Period	2/11/03 → 7/11/03

An XPS comparison of ALD and PLD grown thin AI₂O₃ layers
Zinine, A., Sturm, M., Wormeester, H. & Poelsema, B., 16 Dec 2003. 1 p.
Research output: Contribution to conference › Poster › Other research output
An XPS comparison of ALD and PLD grown thin AI₂O₃ layers
Zinine, A., Sturm, M., Wormeester, H. & Poelsema, B., 2 Aug 2003. 1 p.
Research output: Contribution to conference › Poster › Other research output