Analyse van hoge-k oxides. XPS-SPM opstelling gekoppeld aan depositieopstelling

Research output: Contribution to journal › Article › Academic

Keywords

@article{668b7f4368db4e5ca912cea6edb7d616,

title = "Analyse van hoge-k oxides. XPS-SPM opstelling gekoppeld aan depositieopstelling",

keywords = "METIS-221086",

author = "Sturm, {Jacobus Marinus} and A. Zinine and H.J.M. Oerbekke and Herbert Wormeester and Bene Poelsema",

year = "2004",

language = "Undefined",

volume = "42",

pages = "42--",

journal = "NEVAC blad",

issn = "0169-9431",

publisher = "Nederlandse Vacuumvereniging",

}