Analyse van hoge-k oxides: XPS-SPM opstelling gekoppeld aan depositieopstelling

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@article{668b7f4368db4e5ca912cea6edb7d616,

title = "Analyse van hoge-k oxides: XPS-SPM opstelling gekoppeld aan depositieopstelling",

author = "J.M. Sturm and A. Zinine and H.J.M. Oerbekke and H.. Wormeester and B. Poelsema",

year = "2004",

language = "Dutch",

volume = "42",

pages = "42--42",

journal = "NEVAC blad",

issn = "0169-9431",

publisher = "Nederlandse Vacuumvereniging",

}