Abstract
The omni-directional sensitivity pattern of an integrated, three-dimensional acoustic sensor consisting of four hot-wire particle velocity sensors is analyzed theoretically and experimentally. The influence of the probe surface on the measured direction of particle velocity is nvestigated and a description of the gas flow profile around the integrated sensor is presented. A theoretical model describing the fluid flow in the vicinity of a simplified
geometry, a plate of finite width, is shown to give a relatively adequate description for the gas flow around the probe. The analysis results in a number of design rules to optimize the device performance.
Original language | Undefined |
---|---|
Article number | 10.1088/0960-1317/17/7/S11 |
Pages (from-to) | S137-S146 |
Number of pages | 9 |
Journal | Journal of micromechanics and microengineering |
Volume | 17 |
Issue number | WP07-01 |
DOIs | |
Publication status | Published - 3 Mar 2007 |
Keywords
- EWI-9785
- METIS-241619
- IR-64018