Analysis of a three-dimensional particle velocity sensor for design optimization

J.W. van Honschoten, Doekle Reinder Yntema, Remco J. Wiegerink, Michael Curt Elwenspoek

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    14 Citations (Scopus)


    The omni-directional sensitivity pattern of an integrated, three-dimensional acoustic sensor consisting of four hot-wire particle velocity sensors is analyzed theoretically and experimentally. The influence of the probe surface on the measured direction of particle velocity is nvestigated and a description of the gas flow profile around the integrated sensor is presented. A theoretical model describing the fluid flow in the vicinity of a simplified geometry, a plate of finite width, is shown to give a relatively adequate description for the gas flow around the probe. The analysis results in a number of design rules to optimize the device performance.
    Original languageUndefined
    Article number10.1088/0960-1317/17/7/S11
    Pages (from-to)S137-S146
    Number of pages9
    JournalJournal of micromechanics and microengineering
    Issue numberWP07-01
    Publication statusPublished - 3 Mar 2007


    • EWI-9785
    • METIS-241619
    • IR-64018

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