Abstract
The omni-directional sensitivity pattern of an integrated, three-dimensional acoustic sensor consisting of four hot-wire particle velocity sensors is analyzed theoretically and experimentally. The influence of the probe surface on the measured direction of particle velocity is nvestigated and a description of the gas flow profile around the integrated sensor is presented. A theoretical model describing the fluid flow in the vicinity of a simplified
geometry, a plate of finite width, is shown to give a relatively adequate description for the gas flow around the probe. The analysis results in a number of design rules to optimize the device performance.
| Original language | English |
|---|---|
| Pages (from-to) | S137-S146 |
| Number of pages | 9 |
| Journal | Journal of micromechanics and microengineering |
| Volume | 17 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 3 Mar 2007 |
Keywords
- 2020 OA procedure
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