Analysis of extreme ultraviolet induced surface defect processes

Research output: Thesis › PhD Thesis - Research UT, graduation UT

4180 Downloads (Pure)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Bijkerk, Fred, Supervisor Lee, C.J., Co-Supervisor
Award date	22 Oct 2015
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	978-90-365-3985-2
DOIs	https://doi.org/10.3990/1.9789036539852
Publication status	Published - 22 Oct 2015

Access to Document

@phdthesis{6088db24ab644daa966fcf1f8259b8e6,

title = "Analysis of extreme ultraviolet induced surface defect processes",

author = "An Gao",

year = "2015",

month = oct,

day = "22",

doi = "10.3990/1.9789036539852",

language = "English",

isbn = "978-90-365-3985-2",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

school = "University of Twente",

}