Analysis of ferroelectric and electrical properties of sub 100 nm thick PZT/LNO stacks on an encapsulated TiN electrode

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 16 Sept 2013
Event	39th International Conference on Mico and Nano Engineering (MNE) - London, England Duration: 16 Sept 2013 → 19 Sept 2013

Conference	39th International Conference on Mico and Nano Engineering (MNE)
City	London, England
Period	16/09/13 → 19/09/13

Keywords

@conference{0fb1e4642ace48ada243f2e8bc8e371c,

title = "Analysis of ferroelectric and electrical properties of sub 100 nm thick PZT/LNO stacks on an encapsulated TiN electrode",

keywords = "METIS-299350",

author = "B. Kaleli and Nguyen, {Duc Minh} and Jurriaan Schmitz and Wolters, {Robertus A.M.} and Hueting, {Raymond Josephus Engelbart}",

year = "2013",

month = sep,

day = "16",

language = "Undefined",

pages = "--",

note = "39th International Conference on Mico and Nano Engineering (MNE) ; Conference date: 16-09-2013 Through 19-09-2013",

}

Research output: Contribution to conference › Poster › Other research output

TY - CONF

T1 - Analysis of ferroelectric and electrical properties of sub 100 nm thick PZT/LNO stacks on an encapsulated TiN electrode

AU - Kaleli, B.

AU - Nguyen, Duc Minh

AU - Schmitz, Jurriaan

AU - Wolters, Robertus A.M.

AU - Hueting, Raymond Josephus Engelbart

PY - 2013/9/16

Y1 - 2013/9/16

KW - METIS-299350

M3 - Poster

SP - -

T2 - 39th International Conference on Mico and Nano Engineering (MNE)

Y2 - 16 September 2013 through 19 September 2013

ER -