It is rather difficult to compare quantitatively flatness measuring results of one and the same object (e.g. in case of a long-term stability investigation) or the results of a series of products (e.g. from the same machinetool in order to indicate machinetool-influences). An extension of a computerprogram applied to the evaluation of flatness measurement (as described in the CIRP-Annals, vol. 26 (1977), no.1), separates the form deviations of a surface into a geometrical part and a random part. The geometric part consists of a best-fitting non-flat, reference plane, composed of the single curvature of a sphere and the double curvature of a real twisted plane. Three parameters (the dimensionless curvature parameters of sphericity and torsion, together with the direction of the torsionvector) are able to characterize the geometrical part of the surface; a fourth one is a measure for the random part. Advantages of the method are demonstrated with the aid of a long-term investigation into the form stability of a granite surface plate. Another extension of the program makes it now possible to measure surfaces with non-rectangular contours in the same way as it is being done in case of a rectangular surface plate.