Analysis of packaging effects on the performance of the microflown

J.W. van Honschoten, D.R. Yntema, M. Dijkstra, V.B. Svetovoy, R.J. Wiegerink, M. Elwenspoek

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    Abstract

    The packaging effects of an acoustic particle velocity sensor have been analysed both analytically and by means of finite volume simulations on fluid dynamics. The results are compared with acoustic experiments that show a large magnification of the output signal of the sensor due to the mounting inside a cylindrically shaped package. The influences of the package consist of a decrease of the output signal at frequencies below 1 Hz, whereas signals with frequencies above 10 Hz are amplified by a constant factor of approximately 3.5 (11 dB). The analysis leads to an improved insight into the effects of viscosity and fluid flow that play a role in flow sensing and opens the way for further optimisation of sensitivity and bandwidth of the sensor.
    Original languageEnglish
    Title of host publicationProceedings of DTIP of MEMS & MOEMS 2006
    Subtitle of host publicationdesign, test, integration and packaging of MEMS-MOEMS 2006 : 26-28 April 2006, Stresa, Lago Maggiore, Italy
    EditorsShawn Blanton, Alain Bosseboeuf
    Place of PublicationGrenoble
    PublisherTIMA Editions
    Pages1-6
    Number of pages6
    ISBN (Print)2-916187-03-0
    Publication statusPublished - 26 Apr 2006
    Event2006 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2006
    - Stresa, Italy
    Duration: 26 Apr 200628 Apr 2006

    Conference

    Conference2006 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2006
    Abbreviated titleDTIP
    CountryItaly
    CityStresa
    Period26/04/0628/04/06

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