Abstract
The packaging effects of an acoustic particle velocity
sensor have been analysed both analytically and by means
of finite volume simulations on fluid dynamics. The
results are compared with acoustic experiments that show
a large magnification of the output signal of the sensor
due to the mounting inside a cylindrically shaped
package. The influences of the package consist of a
decrease of the output signal at frequencies below 1 Hz,
whereas signals with frequencies above 10 Hz are
amplified by a constant factor of approximately
3.5 (11 dB). The analysis leads to an improved insight
into the effects of viscosity and fluid flow that play a role in flow sensing and opens the way for further
optimisation of sensitivity and bandwidth of the sensor.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of DTIP of MEMS & MOEMS 2006 |
| Subtitle of host publication | design, test, integration and packaging of MEMS-MOEMS 2006 : 26-28 April 2006, Stresa, Lago Maggiore, Italy |
| Editors | Shawn Blanton, Alain Bosseboeuf |
| Place of Publication | Grenoble |
| Publisher | TIMA Editions |
| Pages | 1-6 |
| Number of pages | 6 |
| ISBN (Print) | 2-916187-03-0 |
| Publication status | Published - 26 Apr 2006 |
| Event | 2006 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2006 - Stresa, Italy Duration: 26 Apr 2006 → 28 Apr 2006 |
Conference
| Conference | 2006 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2006 |
|---|---|
| Abbreviated title | DTIP |
| Country/Territory | Italy |
| City | Stresa |
| Period | 26/04/06 → 28/04/06 |