Analysis of the angular sensitivity of an innovative particle velocity sensor

J.W. van Honschoten, Doekle Reinder Yntema, Remco J. Wiegerink, Michael Curt Elwenspoek

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    1 Citation (Scopus)
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    Abstract—In this paper a novel micromachined acoustic sensor consisting of four heated wires is analyzed theoretically and experimentally. The presence of the chip surface of the probe in the vicinity of the wires influences the local fluid flow, while it also affects the temperature distribution in the probe by altering the direction of heat transport. Both effects result into a specific angular dependence of the sensor sensitivity. To explain this specific directionality of the sensitivity, an analytical model is presented that describes both the air flow around the probe and the temperature profile around the heated wires. Acoustic flow measurements on the probe sensitivity are compared with the theory and with numerical simulations on the device, showing good qualitative and quantitative correspondence.
    Original languageUndefined
    Title of host publicationProceedings of IEEE Sensors 2008
    Place of PublicationLecce, Italy
    PublisherLecce University
    Number of pages4
    ISBN (Print)9781424425815
    Publication statusPublished - 2008
    Event2008 IEEE Sensors - Hotel Tiziano, Lecce, Italy
    Duration: 26 Oct 200829 Oct 2008

    Publication series

    PublisherLecce University


    Conference2008 IEEE Sensors


    • EWI-14656
    • METIS-255422
    • IR-65235

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