Analysis of the angular sensitivity of an innovative particle velocity sensor

J.W. van Honschoten; Doekle Reinder Yntema; Remco J. Wiegerink; Michael Curt Elwenspoek

doi:10.1109/ICSENS.2008.4716381

Analysis of the angular sensitivity of an innovative particle velocity sensor

J.W. van Honschoten, Doekle Reinder Yntema, Remco J. Wiegerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

161 Downloads (Pure)

Abstract

Abstract—In this paper a novel micromachined acoustic sensor consisting of four heated wires is analyzed theoretically and experimentally. The presence of the chip surface of the probe in the vicinity of the wires influences the local fluid flow, while it also affects the temperature distribution in the probe by altering the direction of heat transport. Both effects result into a specific angular dependence of the sensor sensitivity. To explain this specific directionality of the sensitivity, an analytical model is presented that describes both the air flow around the probe and the temperature profile around the heated wires. Acoustic flow measurements on the probe sensitivity are compared with the theory and with numerical simulations on the device, showing good qualitative and quantitative correspondence.

Original language	Undefined
Title of host publication	Proceedings of IEEE Sensors 2008
Place of Publication	Lecce, Italy
Publisher	Lecce University
Pages	4
Number of pages	4
ISBN (Print)	9781424425815
DOIs	https://doi.org/10.1109/ICSENS.2008.4716381
Publication status	Published - 2008
Event	2008 IEEE Sensors - Hotel Tiziano, Lecce, Italy Duration: 26 Oct 2008 → 29 Oct 2008

Publication series

Name
Publisher	Lecce University

Conference

Conference	2008 IEEE Sensors
Country/Territory	Italy
City	Lecce
Period	26/10/08 → 29/10/08

Keywords

EWI-14656
METIS-255422
IR-65235

Access to Document

10.1109/ICSENS.2008.4716381

Cite this

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title = "Analysis of the angular sensitivity of an innovative particle velocity sensor",

abstract = "Abstract—In this paper a novel micromachined acoustic sensor consisting of four heated wires is analyzed theoretically and experimentally. The presence of the chip surface of the probe in the vicinity of the wires influences the local fluid flow, while it also affects the temperature distribution in the probe by altering the direction of heat transport. Both effects result into a specific angular dependence of the sensor sensitivity. To explain this specific directionality of the sensitivity, an analytical model is presented that describes both the air flow around the probe and the temperature profile around the heated wires. Acoustic flow measurements on the probe sensitivity are compared with the theory and with numerical simulations on the device, showing good qualitative and quantitative correspondence.",

keywords = "EWI-14656, METIS-255422, IR-65235",

author = "{van Honschoten}, J.W. and Yntema, {Doekle Reinder} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",

note = "10.1109/ICSENS.2008.4716381 ; null ; Conference date: 26-10-2008 Through 29-10-2008",

year = "2008",

doi = "10.1109/ICSENS.2008.4716381",

language = "Undefined",

isbn = "9781424425815",

publisher = "Lecce University",

pages = "4",

booktitle = "Proceedings of IEEE Sensors 2008",

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Analysis of the angular sensitivity of an innovative particle velocity sensor. / van Honschoten, J.W.; Yntema, Doekle Reinder ; Wiegerink, Remco J. et al.

Proceedings of IEEE Sensors 2008. Lecce, Italy : Lecce University, 2008. p. 4 10.1109/ICSENS.2008.4716381.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - van Honschoten, J.W.

AU - Yntema, Doekle Reinder

AU - Wiegerink, Remco J.

AU - Elwenspoek, Michael Curt

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PY - 2008

Y1 - 2008

N2 - Abstract—In this paper a novel micromachined acoustic sensor consisting of four heated wires is analyzed theoretically and experimentally. The presence of the chip surface of the probe in the vicinity of the wires influences the local fluid flow, while it also affects the temperature distribution in the probe by altering the direction of heat transport. Both effects result into a specific angular dependence of the sensor sensitivity. To explain this specific directionality of the sensitivity, an analytical model is presented that describes both the air flow around the probe and the temperature profile around the heated wires. Acoustic flow measurements on the probe sensitivity are compared with the theory and with numerical simulations on the device, showing good qualitative and quantitative correspondence.

AB - Abstract—In this paper a novel micromachined acoustic sensor consisting of four heated wires is analyzed theoretically and experimentally. The presence of the chip surface of the probe in the vicinity of the wires influences the local fluid flow, while it also affects the temperature distribution in the probe by altering the direction of heat transport. Both effects result into a specific angular dependence of the sensor sensitivity. To explain this specific directionality of the sensitivity, an analytical model is presented that describes both the air flow around the probe and the temperature profile around the heated wires. Acoustic flow measurements on the probe sensitivity are compared with the theory and with numerical simulations on the device, showing good qualitative and quantitative correspondence.

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KW - METIS-255422

KW - IR-65235

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DO - 10.1109/ICSENS.2008.4716381

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BT - Proceedings of IEEE Sensors 2008

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