Abstract
An analysis is presented of the emitter charge storage in SiGe HBTs with a lightly doped emitter (LDE) and the mechanisms that lead to the experimentally observed reduction of the fTare identified. The charge storage in the LDE is important for doping concentrations below 3×1017cm-3and scales with the thickness. It also depends on the Gummel number of the base and the doping concentration of the collector epilayer. For LDE concentrations below 1017cm-3and collector currents above 104A/cm2the gradient of the hole distribution can even become negative and cause excessive charge storage. However, under very high injection-beyond the fT,max-the LDE storage decreases which gives a second peak in the fTcharacteristics. In order to achieve the maximum fT, the LDE must be thin (= 50 nm) and highly doped (= 3×1017cm-3).
Original language | English |
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Title of host publication | 30th European Solid-State Device Research Conference |
Editors | H. Grunbacher, Gabriel M. Crean, W. A. Lane, Frank A. McCabe |
Publisher | IEEE |
Pages | 568-571 |
Number of pages | 4 |
ISBN (Print) | 9782863322482 |
DOIs | |
Publication status | Published - 1 Jan 2000 |
Externally published | Yes |
Event | 30th European Solid-State Device Research Conference, ESSDERC 2000 - Cork, Ireland Duration: 11 Sept 2000 → 13 Sept 2000 Conference number: 30 |
Conference
Conference | 30th European Solid-State Device Research Conference, ESSDERC 2000 |
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Abbreviated title | ESSDERC 2000 |
Country/Territory | Ireland |
City | Cork |
Period | 11/09/00 → 13/09/00 |