Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach

Roald M. Tiggelaar, Theo T. Veenstra, Remco G.P. Sanders, Erwin Berenschot, Han Gardeniers, Miko Elwenspoek, Albert Prak, Richard Mateman, Jeroen M. Wissink, Albert van den Berg

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16 Citations (Scopus)

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Engineering & Materials Science