Abstract
An analytic theory describing soft x-ray diffraction by Lamellar Multilayer Gratings (LMG) has been developed. The theory is derived from a coupled waves approach for LMGs operating in the single-order regime, where an incident plane wave can only excite a single diffraction order. The results from calculations based on these very simple analytic expressions are demonstrated to be in excellent agreement with those obtained using the rigorous coupled-waves approach. The conditions for maximum reflectivity and diffraction efficiency are deduced and discussed. A brief investigation into p-polarized radiation diffraction is also performed.
Original language | English |
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Pages (from-to) | 9172-9184 |
Number of pages | 12 |
Journal | Optics express |
Volume | 19 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2011 |