Analytic theory of soft x-ray diffraction by lamellar multilayer gratings

I.V. Kozhevnikov, R. van der Meer, Hubertus M.J. Bastiaens, Klaus J. Boller, Frederik Bijkerk

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20 Citations (Scopus)
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An analytic theory describing soft x-ray diffraction by Lamellar Multilayer Gratings (LMG) has been developed. The theory is derived from a coupled waves approach for LMGs operating in the single-order regime, where an incident plane wave can only excite a single diffraction order. The results from calculations based on these very simple analytic expressions are demonstrated to be in excellent agreement with those obtained using the rigorous coupled-waves approach. The conditions for maximum reflectivity and diffraction efficiency are deduced and discussed. A brief investigation into p-polarized radiation diffraction is also performed.
Original languageEnglish
Pages (from-to)9172-9184
Number of pages12
JournalOptics express
Issue number10
Publication statusPublished - 2011


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