Analytical representation of orientation-dependent crystal growth and etch rate functions

J. van Suchtelen, K. Sato, E. van Veenendaal, A.J. Nijdam

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationJeruzalem
    Publication statusPublished - 28 Jul 1998

    Keywords

    • METIS-114714

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