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Analytical representation of orientation-dependent crystal growth and etch rate functions

  • J. van Suchtelen
  • , K. Sato
  • , E. van Veenendaal
  • , A.J. Nijdam

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationJeruzalem
    Publication statusPublished - 28 Jul 1998

    Keywords

    • METIS-114714

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