Anisotropic etching with TMAH-IPA

R.E.G. van Hal, W. Streekstra, Piet Bergveld

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 16 Mar 1993
    EventSensortechnologie Workshop 1993: (STW Workshop Sensor Technology) - Nationaal Sportcentrum Papendal, Arnhem, Netherlands
    Duration: 16 Mar 199317 Mar 1993

    Conference

    ConferenceSensortechnologie Workshop 1993
    CountryNetherlands
    CityArnhem
    Period16/03/9317/03/93

    Keywords

    • METIS-118102

    Cite this

    van Hal, R. E. G., Streekstra, W., & Bergveld, P. (1993). Anisotropic etching with TMAH-IPA. -. Poster session presented at Sensortechnologie Workshop 1993, Arnhem, Netherlands.
    van Hal, R.E.G. ; Streekstra, W. ; Bergveld, Piet. / Anisotropic etching with TMAH-IPA. Poster session presented at Sensortechnologie Workshop 1993, Arnhem, Netherlands.
    @conference{e73c9362c0ac4d429815956d55a74258,
    title = "Anisotropic etching with TMAH-IPA",
    keywords = "METIS-118102",
    author = "{van Hal}, R.E.G. and W. Streekstra and Piet Bergveld",
    year = "1993",
    month = "3",
    day = "16",
    language = "Undefined",
    pages = "--",
    note = "null ; Conference date: 16-03-1993 Through 17-03-1993",

    }

    van Hal, REG, Streekstra, W & Bergveld, P 1993, 'Anisotropic etching with TMAH-IPA' Sensortechnologie Workshop 1993, Arnhem, Netherlands, 16/03/93 - 17/03/93, pp. -.

    Anisotropic etching with TMAH-IPA. / van Hal, R.E.G.; Streekstra, W.; Bergveld, Piet.

    1993. - Poster session presented at Sensortechnologie Workshop 1993, Arnhem, Netherlands.

    Research output: Contribution to conferencePoster

    TY - CONF

    T1 - Anisotropic etching with TMAH-IPA

    AU - van Hal, R.E.G.

    AU - Streekstra, W.

    AU - Bergveld, Piet

    PY - 1993/3/16

    Y1 - 1993/3/16

    KW - METIS-118102

    M3 - Poster

    SP - -

    ER -

    van Hal REG, Streekstra W, Bergveld P. Anisotropic etching with TMAH-IPA. 1993. Poster session presented at Sensortechnologie Workshop 1993, Arnhem, Netherlands.