Anisotropic etching with TMAH-IPA

R.E.G. van Hal, W. Streekstra, P. Bergveld

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 16 Mar 1993
Event	Sensortechnologie Workshop 1993: (STW Workshop Sensor Technology) - Nationaal Sportcentrum Papendal, Arnhem, Netherlands Duration: 16 Mar 1993 → 17 Mar 1993

Conference	Sensortechnologie Workshop 1993
Country/Territory	Netherlands
City	Arnhem
Period	16/03/93 → 17/03/93

Anisotropic etching with TMAH-IPA
van Hal, R. E. G., Streekstra, W. & Bergveld, P., 17 Jun 1993. 1 p.
Research output: Contribution to conference › Poster › Other research output

Cite this

@conference{e73c9362c0ac4d429815956d55a74258,

title = "Anisotropic etching with TMAH-IPA",

author = "{van Hal}, R.E.G. and W. Streekstra and P. Bergveld",

year = "1993",

month = mar,

day = "16",

language = "English",

note = "Sensortechnologie Workshop 1993 : (STW Workshop Sensor Technology) ; Conference date: 16-03-1993 Through 17-03-1993",

}