Anisotropic etching with TMAH-IPA

R.E.G. van Hal, W. Streekstra, P. Bergveld

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 16 Mar 1993
    EventSensortechnologie Workshop 1993: (STW Workshop Sensor Technology) - Nationaal Sportcentrum Papendal, Arnhem, Netherlands
    Duration: 16 Mar 199317 Mar 1993

    Conference

    ConferenceSensortechnologie Workshop 1993
    CountryNetherlands
    CityArnhem
    Period16/03/9317/03/93

    Cite this

    van Hal, R. E. G., Streekstra, W., & Bergveld, P. (1993). Anisotropic etching with TMAH-IPA. Poster session presented at Sensortechnologie Workshop 1993, Arnhem, Netherlands.