Anisotropic optical reflection by stepped surfaces

P.L. de Boeij, C.M.J. Wijers, E. Zoethout

Research output: Contribution to journalArticleAcademicpeer-review

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Discrete dipole calculations of the double cell type have been used to study the anisotropic reflection at normal incidence of stepped Si(001̄) 2×1‐type surfaces. Only DB‐type steps have been used. The maximum of the anisotropy turns out to be in a direction rotated with respect to the principal axes, and the anisotropy itself depends strongly on terrace width. Further the crossed polarizer configuration is interesting for experimental work since it has no offset.
Original languageEnglish
Pages (from-to)3080-3088
Number of pages9
JournalJournal of vacuum science and technology. B: Microelectronics and nanometer structures
Issue number4
Publication statusPublished - 1996


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