Anisotropic optical reflection by stepped surfaces

P.L. de Boeij; C.M.J. Wijers; E. Zoethout

doi:10.1116/1.589068

Anisotropic optical reflection by stepped surfaces

P.L. de Boeij, C.M.J. Wijers, E. Zoethout

Physics of Interfaces and Nanomaterials

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Abstract

Discrete dipole calculations of the double cell type have been used to study the anisotropic reflection at normal incidence of stepped Si(001̄) 2×1‐type surfaces. Only DB‐type steps have been used. The maximum of the anisotropy turns out to be in a direction rotated with respect to the principal axes, and the anisotropy itself depends strongly on terrace width. Further the crossed polarizer configuration is interesting for experimental work since it has no offset.

Original language	English
Pages (from-to)	3080-3088
Number of pages	9
Journal	Journal of vacuum science and technology. B: Microelectronics and nanometer structures
Volume	14
Issue number	4
DOIs	https://doi.org/10.1116/1.589068
Publication status	Published - 1996

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title = "Anisotropic optical reflection by stepped surfaces",

abstract = "Discrete dipole calculations of the double cell type have been used to study the anisotropic reflection at normal incidence of stepped Si(00{\=1}) 2×1‐type surfaces. Only DB‐type steps have been used. The maximum of the anisotropy turns out to be in a direction rotated with respect to the principal axes, and the anisotropy itself depends strongly on terrace width. Further the crossed polarizer configuration is interesting for experimental work since it has no offset.",

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T1 - Anisotropic optical reflection by stepped surfaces

AU - de Boeij, P.L.

AU - Wijers, C.M.J.

AU - Zoethout, E.

PY - 1996

Y1 - 1996

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AB - Discrete dipole calculations of the double cell type have been used to study the anisotropic reflection at normal incidence of stepped Si(001̄) 2×1‐type surfaces. Only DB‐type steps have been used. The maximum of the anisotropy turns out to be in a direction rotated with respect to the principal axes, and the anisotropy itself depends strongly on terrace width. Further the crossed polarizer configuration is interesting for experimental work since it has no offset.

U2 - 10.1116/1.589068

DO - 10.1116/1.589068

M3 - Article

SN - 1071-1023

VL - 14

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EP - 3088

JO - Journal of vacuum science and technology. B: Microelectronics and nanometer structures

JF - Journal of vacuum science and technology. B: Microelectronics and nanometer structures

IS - 4

ER -

Anisotropic optical reflection by stepped surfaces

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