Anisotropy of heat conduction in Mo/Si multilayers

V.V. Medvedev, J. Yang, A.J. Schmidt, A.E. Yakshin, R.W.E. van de Kruijs, E. Zoethout, F. Bijkerk

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This paper reports on the studies of anisotropic heat conduction phenomena in Mo/Si multilayers with individual layer thicknesses selected to be smaller than the mean free path of heat carriers. We applied the frequency-domain thermoreflectance technique to characterize the thermal conductivity tensor. While the mechanisms of the cross-plane heat conduction were studied in detail previously, here we focus on the in-plane heat conduction. To analyze the relative contribution of electron transport to the in-plane heat conduction, we applied sheet-resistance measurements. Results of Mo/Si multilayers with variable thickness of the Mo layers indicate that the net in-plane thermal conductivity depends on the microstructure of the Mo layers.
Original languageEnglish
Article number085101
JournalJournal of Applied Physics
Issue number8
Publication statusPublished - 2015


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