Anomalous surface damage production during high energy implantation analysed by ellipsometry and RBS

T. Lohner, M.A. El-Sherbiny, N.Q. Khánh, M. Fried, H. Wormeester, J. Gyulai

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Fingerprint

Dive into the research topics of 'Anomalous surface damage production during high energy implantation analysed by ellipsometry and RBS'. Together they form a unique fingerprint.

Pharmacology, Toxicology and Pharmaceutical Science

Material Science

Physics

Medicine and Dentistry