Anomalous surface damage production during high energy implantation analysed by ellipsometry and RBS

T. Lohner, M.A. El-Sherbiny, N.Q. Khánh, M. Fried, H. Wormeester, J. Gyulai

Physics of Interfaces and Nanomaterials

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Conference contribution

1 results

1995
Anomalous surface damage production during high energy implantation analysed by ellipsometry and RBS
Lohner, T., El-Sherbiny, M. A., Khánh, N. Q., Fried, M., Wormeester, H. & Gyulai, J., 1995, Ninth International Conference on Ion Beam Modification of Materials: Book of Abstracts. Canberra, Australia, 10.007
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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