Anomalous surface damage production during high energy implantation analysed by ellipsometry and RBS

T. Lohner, M.A. El-Sherbiny, N.Q. Khánh, M. Fried, H. Wormeester, J. Gyulai

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  • 1996

    Anomalous surface damage production during high energy implantation analysed by ellipsometry and RBS

    Lohner, T., El-Sherbiny, M. A., Khánh, N. Q., Fried, M., Wormeester, H. & Gyulai, J., 5 Feb 1996, Ion Beam Modification of Materials: Proceedings of the Ninth International Conference on Ion Beam Modification of Materials, Canberra, Australia, 5-10 February 1995. Williams, J. S., Elliman, R. G. & Ridgway, M. C. (eds.). Canberra, Australia: Elsevier, p. 797-801 5 p.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review