Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction

Zhichun Wang, Cora Salm, F.G. Kuper, A. Scarpa

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of SAFE conference 2000
    Place of PublicationVeldhoven, The Netherlands
    Pages-
    Number of pages3
    Publication statusPublished - 29 Nov 2000

    Keywords

    • METIS-113892

    Cite this

    Wang, Z., Salm, C., Kuper, F. G., & Scarpa, A. (2000). Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction. In Proceedings of SAFE conference 2000 (pp. -). Veldhoven, The Netherlands.
    Wang, Zhichun ; Salm, Cora ; Kuper, F.G. ; Scarpa, A. / Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction. Proceedings of SAFE conference 2000. Veldhoven, The Netherlands, 2000. pp. -
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    title = "Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction",
    keywords = "METIS-113892",
    author = "Zhichun Wang and Cora Salm and F.G. Kuper and A. Scarpa",
    year = "2000",
    month = "11",
    day = "29",
    language = "Undefined",
    isbn = "90-73461-24-3",
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    booktitle = "Proceedings of SAFE conference 2000",

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    Wang, Z, Salm, C, Kuper, FG & Scarpa, A 2000, Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction. in Proceedings of SAFE conference 2000. Veldhoven, The Netherlands, pp. -.

    Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction. / Wang, Zhichun; Salm, Cora; Kuper, F.G.; Scarpa, A.

    Proceedings of SAFE conference 2000. Veldhoven, The Netherlands, 2000. p. -.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction

    AU - Wang, Zhichun

    AU - Salm, Cora

    AU - Kuper, F.G.

    AU - Scarpa, A.

    PY - 2000/11/29

    Y1 - 2000/11/29

    KW - METIS-113892

    M3 - Conference contribution

    SN - 90-73461-24-3

    SP - -

    BT - Proceedings of SAFE conference 2000

    CY - Veldhoven, The Netherlands

    ER -

    Wang Z, Salm C, Kuper FG, Scarpa A. Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction. In Proceedings of SAFE conference 2000. Veldhoven, The Netherlands. 2000. p. -