Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction

Zhichun Wang, Cora Salm, F.G. Kuper, A. Scarpa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of SAFE conference 2000
Place of Publication	Veldhoven, The Netherlands
Pages	-
Number of pages	3
Publication status	Published - 29 Nov 2000

Keywords

@inproceedings{bad46e3c1bd94af3aa32e556720b83c1,

title = "Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction",

keywords = "METIS-113892",

author = "Zhichun Wang and Cora Salm and F.G. Kuper and A. Scarpa",

year = "2000",

month = nov,

day = "29",

language = "Undefined",

isbn = "90-73461-24-3",

pages = "--",

booktitle = "Proceedings of SAFE conference 2000",

}