Antenna Ratio Power Law Dependence of Plasma Process-Induced Oxide Failure Fraction

Zhichun Wang, Cora Salm, F.G. Kuper, A. Scarpa

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of SAFE conference 2000
    Place of PublicationVeldhoven, The Netherlands
    Number of pages3
    Publication statusPublished - 29 Nov 2000


    • METIS-113892

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