Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

    Research output: Contribution to conferencePaper

    2 Downloads (Pure)

    Abstract

    We have designed and realized a new antifuse hot-spot device to be used in gas sensing applications. The antifuse structure was realized on a suspended membrane to minimize the heat losses. For the sensing of alkanes a procedure for making a porous alumina layer doped with Platinum was developed. The device was electrically characterized and gas sensing experiments were conducted.
    Original languageUndefined
    Pages693-696
    Number of pages4
    Publication statusPublished - 25 Nov 2003
    Event6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003 - Veldhoven, Netherlands
    Duration: 25 Nov 200326 Nov 2003
    Conference number: 6

    Conference

    Conference6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period25/11/0326/11/03

    Keywords

    • IR-67742
    • EWI-15565

    Cite this

    Iordache, G., Holleman, J., Kovalgin, A. Y., & Jenneboer, A. J. S. M. (2003). Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. 693-696. Paper presented at 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, Veldhoven, Netherlands.
    Iordache, G. ; Holleman, J. ; Kovalgin, Alexeij Y. ; Jenneboer, Antonius J.S.M. / Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. Paper presented at 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, Veldhoven, Netherlands.4 p.
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    title = "Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications",
    abstract = "We have designed and realized a new antifuse hot-spot device to be used in gas sensing applications. The antifuse structure was realized on a suspended membrane to minimize the heat losses. For the sensing of alkanes a procedure for making a porous alumina layer doped with Platinum was developed. The device was electrically characterized and gas sensing experiments were conducted.",
    keywords = "IR-67742, EWI-15565",
    author = "G. Iordache and J. Holleman and Kovalgin, {Alexeij Y.} and Jenneboer, {Antonius J.S.M.}",
    year = "2003",
    month = "11",
    day = "25",
    language = "Undefined",
    pages = "693--696",
    note = "null ; Conference date: 25-11-2003 Through 26-11-2003",

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    Iordache, G, Holleman, J, Kovalgin, AY & Jenneboer, AJSM 2003, 'Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications' Paper presented at 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, Veldhoven, Netherlands, 25/11/03 - 26/11/03, pp. 693-696.

    Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. / Iordache, G.; Holleman, J.; Kovalgin, Alexeij Y.; Jenneboer, Antonius J.S.M.

    2003. 693-696 Paper presented at 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, Veldhoven, Netherlands.

    Research output: Contribution to conferencePaper

    TY - CONF

    T1 - Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

    AU - Iordache, G.

    AU - Holleman, J.

    AU - Kovalgin, Alexeij Y.

    AU - Jenneboer, Antonius J.S.M.

    PY - 2003/11/25

    Y1 - 2003/11/25

    N2 - We have designed and realized a new antifuse hot-spot device to be used in gas sensing applications. The antifuse structure was realized on a suspended membrane to minimize the heat losses. For the sensing of alkanes a procedure for making a porous alumina layer doped with Platinum was developed. The device was electrically characterized and gas sensing experiments were conducted.

    AB - We have designed and realized a new antifuse hot-spot device to be used in gas sensing applications. The antifuse structure was realized on a suspended membrane to minimize the heat losses. For the sensing of alkanes a procedure for making a porous alumina layer doped with Platinum was developed. The device was electrically characterized and gas sensing experiments were conducted.

    KW - IR-67742

    KW - EWI-15565

    M3 - Paper

    SP - 693

    EP - 696

    ER -

    Iordache G, Holleman J, Kovalgin AY, Jenneboer AJSM. Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. 2003. Paper presented at 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, Veldhoven, Netherlands.